Specs:
Stage Size: 300 × 200 mm (11.81″ × 7.87″)
Measurement Modes: Wide-Field (300 × 200 mm) / High-Precision (225 × 125 mm)
Image Sensor: 1″ 20-megapixel monochrome CMOS
Lens: Double telecentric lens
Measurement Accuracy (±2σ): Wide-Field ±(2.8 + 0.02D) μm; High-Precision ±(1.4 + 0.04D) μm
Repeatability: Wide-Field ±1 μm; High-Precision ±0.5 μm
XY Stage Movement: 200 × 100 mm (electric); Z Range: 75 mm
Stage Load Capacity: 7.5 kg
Display: 12.1″ LCD (1280 × 800 WXGA)
Connectivity: LAN (RJ-45), USB 3.1 (×4), USB 2.0 (×4), DVI-D
Power: 100–240 VAC, 50/60 Hz; 430 VA or less
Operating Temp: +10 to +35°C
Weight: approx. 33 kg
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